AOVtech provides the intelligent defect data management solutions for semiconductor device manufacturers, it is an intelligent tool to control and manage yield.
AOVtech undertakes the defect management solutions by offering the ASSA (Advanced Spatial Signature Analysis):
1. to search the defect signatures in both engineering and real time production mode by using built-in signature patterns without users¡¯ training
2. To predict the malfunctions of tools by detecting the gradual built-up of defect signatures in the defects files, thus, preventing tool malfunctions before it happens. ¨C early warning mode.
3. to provide quick trouble shooting for equipment and process related defect problem
AOVtech has developed a 3rd generation SSA that can automatically recognize the defect spatial distribution patterns, or ¡°signatures¡± from defect files without human reviewing. These signatures point out the potential sources of defects from specific process tools. ASSA can quickly identify potential process equipment problems.
ASSA has been accepted by major wafer fabrication plants and has become an essential tool to enhance the process yield management program
Click for product brochure ASSA Brochure.pdf
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