AOVtech has developed a 3rd generation ASSA that can automatically recognize the defect spatial distribution patterns, or ˇ°signaturesˇ± from defect files without human reviewing. These signatures point out the potential sources of defects from specific process tools. ASSA can quickly identify potential process equipment problems.
Three ASSA Applications:
1.Search finds defect signatures of defect files from a defect file database.
2.Production finds defect signatures from defect files when they are received from inspection tools ¨C before human review.
3.Early Warning finds early signs of defect signatures that are being built-up from gradual decaying or drifting from process tools.
Example:
Built-in Signature Libraries without training, a key features of ASSA which
Contain a rich library of pre-defined or built-in defect patterns. This pre-defined library provides a consistent standard for all the fabs of a company. This ˇ°no operator trainingˇ± feature eliminated the major problems of 1st and 2nd generation SSA, because ˇ°bad samplesˇ± had been trained to system.
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