A Data Base designed to capture valuable engineering knowledge of tools, equipment and process problems in relation to the spatial signature identified by ASSA and ADC. A concept of data mining to assist the process engineer in:

1. providing quick and accurate way to identify the root cause and solution
2. Predicting the process yield or SPC for additional production control.
3. Achieving the higher productivity and increasing yield.

Defect Knowledge Database is an essential tool for process and equipment engineering in managing the complex and advanced wafer processing.

AOVtech has cumulated rich experience in providing customized Data Base to meet customer unique requirement.